MSD Series Sputtering Power Supply

Short Description:

MSD series DC sputtering power supply adopts the company’s core DC control system combined with excellent arc processing scheme, so that the product has very stable performance, high product reliability, small arc damage and good process repeatability. Adopt Chinese and English display interface, easy to operate.

Product Detail

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Features

● Rack installation

● Fast arc response, response time <100ns

● Bottom energy storage, <1mJ/kW

● Compact installation structure, 3U standard chassis

● Chinese/English display interface, easy to operate

● Precise control

● Wide range of output

● Perfect protection function

Product Detail

Input	Input voltage: 3AC380V±10%
Input	Power: 20kW、30 kW Input power frequency: 50Hz/60Hz
Output	Max. output voltage: 800V
	Max. output current: 50A、75A
	Output current ripple: ≤3% rms
	Output Voltage Ripple: ≤2% rms
Technical index	Ignition voltage: 1000V / 1200V optional
	Conversion efficiency: 95%
	Arc off time: ＜100ns
	Communication interface: Standard RS485 / RS232 (PROFIBUS, PROFINET, DeviceNet and EtherCAT are optional)
	Dimension(HWD)mm: 132482560: 176482700
	Cooling mode: air cooling
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.