RMA Series Matchers

Short Description:

It can be adapted to RLS series RF power supply, and is widely used in plasma etching, coating, plasma cleaning, plasma degumming and other processes. When used alone, it can be used together with other manufacturers’ RF power supplies.

Product Detail

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Features

● Half-brick and rack mount styles
● Adopt full digital control, with convenient and rich operation menu
● Frequency tuning, pulse and pulse synchronization functions
● With CEX phase synchronization function
● Perfect protection function

Product Detail

Technical index	Control voltage: AC220V±10%
	Transmission power: 0.5~5kW
	Frequency: 2MHz、13.56MHz、27.12MHz、40.68MHz
	Matching time: end to end ＜ 5S, preset point to matching point ＜ 0.5 ~ 3S
	Standing wave: ＜1.2
	Impedance real part: 5~200Ω
	Impedance imaginary part: +200~-200j
	RF output voltage: 4000Vpeak
	RF output current: 25~40Arms
	Input interface: type N
	Output interface: copper bar or L29
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.