RHH Series RF Power Supply
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RHH Series RF Power Supply
RHH series RF power supply relies on mature RF generation technology to provide customers with RF power supply with greater power, higher precision and fast response. With phase can be set, pulse controllable, digital tuning and other functions. Applicable fields: photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.
Applicable processes: plasma enhanced chemical vapor deposition (PECVD), plasma etching, plasma cleaning, radio frequency ion source, plasma diffusion, plasma polymerization sputtering, reactive sputtering, etc.