MSB Series Medium Frequency Sputtering Power Supply

Short Description:

The MSB Series relies on its excellent waveform modulation technology to output DC, DC pulse, bidirectional square wave, bidirectional trapezoidal wave and other waveform. The product has adjustable output waveform, selectable output frequency, adjustable duty cycle, and precise power control. As well as low energy storage and fast arc response. Provide convenient and precise control for the coating process. The products are mainly used in various thin film manufacturing processes, solar cell industry, and vacuum coating industry; application processes: magnetron sputtering process, twin target sputtering, and tubular PECVD.

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Features

Rack installation
Fast arc response, response time<100ns
Low energy storage, <0.5mJ/ KW
Multi-phase interleaved PFC technology, the power factor is as high as0.95
Various output modes, continuous and intermittent modes can be selected
Inverter circuit adopts full soft switching technology and uses the third-generation semiconductor SiC as the power device, with excellent efficiency
Accurate arc detection, multiple monitoring methods available