MSB Series Medium Frequency Sputtering Power Supply
Features
Rack installation
Fast arc response, response time<100ns
Low energy storage, <0.5mJ/ KW
Multi-phase interleaved PFC technology, the power factor is as high as0.95
Various output modes, continuous and intermittent modes can be selected
Inverter circuit adopts full soft switching technology and uses the third-generation semiconductor SiC as the power device, with excellent efficiency
Accurate arc detection, multiple monitoring methods available
Product Detail
Index | MSB1040(20*2) | MSB1030
|
Input | ||
Input voltage
|
3AC400V、50/60Hz
|
3AC400V、50/60Hz
|
Power level
|
20kW
|
30kw
|
Output modes
|
2 channel
|
1 channel
|
Output | ||
Maximum output current
|
50A*2
|
80A
|
Maximum output voltage
|
600V*2
|
600V
|
Technical indicators | ||
Power factor
|
0.95
|
0.95
|
Conversion efficiency
|
94% Under rated state | 94% Under rated state |
Adjusting accuracy
|
±0.5%
|
±0.5%
|
Arc response time
|
<100ns
|
<100ns
|
Size
|
4U
|
4U
|
Communication
|
Standard RS485/RS232(Profibus、Profinet、DeviceNET、EtherCAT optional ) |
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