MSB Series Medium Frequency Sputtering Power Supply

Short Description:

RHH series RF power supply relies on mature RF generation technology to provide customers with RF power supply with greater power, higher precision and fast response. With phase can be set, pulse controllable, digital tuning and other functions. Applicable fields: photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.

Applicable processes: plasma enhanced chemical vapor deposition (PECVD), plasma etching, plasma cleaning, radio frequency ion source, plasma diffusion, plasma polymerization sputtering, reactive sputtering, etc.

Product Detail

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Features

● Half-brick and rack mount styles

● Adopt full digital control, with convenient and rich operation menu

● Frequency tuning, pulse and pulse synchronization functions

● With CEX phase synchronization function

● Perfect protection function

Product Detail

Input	Input voltage: AC220V±10% 3ΦAC380V±5%(Special specifications can be customized)
Input	Input frequency: 47~63Hz
Output	Output frequency: 13.56MHz、27.12MHz、40.68MHz
	Tuning range: ±5%
	Output power: 1.5~5kW
	Regulation range of output power: 1~100%
	Output impedance: 50Ω+j0
	Output interface: type N
	Output mode: continuous, pulse
	Pulse frequency: 100Hz~100kHz
	Duty cycle: 5~95%
Performance index	Power factor: 0.98
	Frequency stability accuracy: ±0.005%
	Efficiency: 75% (at rated output)
	Harmonic: ＜-45dBc
	Stray: ＜-50dBc
	External control interface: analog quantity, communication and synchronization
	Communication mode: Standard RS485 communication interface; Optional Ether CAT, industrial Ethernet, etc.
Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.