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Microwave Power Supply

Short Description:

Microwave switching power supply is a new type of microwave power supply based on IGBT high frequency inverter technology. It integrates anode high voltage power supply, filament power supply and magnetic field power supply (except 3kW microwave power supply). The wave magnetron provides working conditions. This product is used in MPCVD, microwave plasma etching, microwave plasma degumming and other fields.


Product Detail

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Features

● High frequency inverter technology, high power density, small size and high reliability

● Fast response, precise control and good stability

● The product has constant voltage, constant power and constant current control modes

● All external connectors adopt quick-plug terminals and aerial plugs, which are convenient for installation and maintenance

● Flexible configuration of filament power supply, which can be built-in or external

● Rapid ignition detection and protection

● Rich and fast detection and protection functions

● RS485 standard communication interface

● Adopt standard chassis (3U: 3kW, 6kW, 6U: 10kW, 15kW, 25kW), easy to install

Product Detail

 

1kW Microwave power supply

3kW Microwave power supply

5kW Microwave power supply

10kW Microwave power supply

15kW Microwave power supply

30kW Microwave power supply

75kW Microwave power supply

100kW Microwave power supply

Rated voltage and current of anode

   4.75kV370mA

5.5kV1000mA

7.2kV1300mA

 

10kV1600mA

12.5kV1800mA

13kV3000mA

18kV4500mA

Rated voltage and current of filament

DC3.5V10A

DC6V25A(built-in)

DC12V40A(External)

 

DC15V50A(External)

DC15V50A(External)

AC15V110A(External)

AC15V120A

Rated voltage and current of magnetic field

-

-

DC20V5A

DC100V5A

DC100V5A

DC100V5A

DC100V5A

DC100V10A

Note: the product continues to innovate and the performance continues to improve. This parameter description is for reference only.

 

 

 



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